Optical surface profiler
Location: SRDG cleanroom
The Wyko NT1100 Optical surface profiler from Veeco is a metrology system using non-contact interferometry to measure surface features. The system has two measurement modes:
- Vertical shift interferometry (VSI): this uses white light and is used for measuring features in the range 140 nm to several mm
- Phase shift interferometry (PSI): utilising a filtered light source and a piezo electric phase shift small features can be measured, ~1 to 140 nm.
The system has an automated stitching stage for large area coverage. Measurements can be made on any reflective surface.