FEI Quanta 200F Environmental SEM with EDAX Microanalysis

The Quanta is a versatile high-performance SEM incorporating a field emission electron source for high resolution imaging and beam stability. It can be operated in three modes to accommodate the widest range of samples: high vacuum, low vacuum, and environmental (ESEM). X-ray microanalysis may be undertaken at both high and low vacuum to determine elemental compositions.

Quanta Capabilities:

  • Electron source: Schottky thermal field emitter
  • Accelerating voltage range: 0.2 to 30 kV
  • Pressure in low vacuum mode: <200 Pa
  • Pressure in environmental mode: <4000 Pa
  • Detectors: Everhart-Thornley secondary electron, variable pressure secondary electron, backscattered electron, infra-red chamberscope
  • Resolution at 30 kV: 2 nm
  • Maximum image size: 3584 x 3094 pixels

Quanta Techniques:

  • Secondary electron (SE) and backscattered electron (BSE) imaging: Both can be undertaken in high vacuum, low vacuum, and environmental modes
  • Energy-dispersive X-ray analysis (EDX): EDAX silicon-drift detector enables rapid determination of elemental compositions and acquisition of compositional maps
  • Electron backscatter diffraction (EBSD): TSL system permits determination of the orientations of crystalline samples at high spatial resolution and can be integrated with EDX
  • Cathodoluminescence (CL) imaging: Panchromatic CL detector allows rapid acquisition of images across the visual spectrum
  • Scanning Transmission Electron Microscopy (STEM): Using a specialised detector, bright- and dark-field STEM images can be acquired from thin samples