Number of items: 3.
2008
Burt, D. P., Dobson, P. S. , Donaldson, L. and Weaver, J. M. R.
(2008)
A simple method for high yield fabrication of sharp silicon tips.
Microelectronic Engineering, 85(3),
pp. 625-630.
(doi: 10.1016/j.mee.2007.11.010)
2005
Cao, X. et al.
(2005)
Low damage sputter deposition of tungsten for decanano compound semiconductor transistors.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 23(6),
pp. 3138-3142.
(doi: 10.1116/1.2127937)
2000
Zhou, H., Chong, B.K., Stopford, P., Mills, G., Midha, A., Donaldson, L. and Weaver, J.
(2000)
Lithographically defined nano and micro sensors using "float coating" of resist and electron beam lithography.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 18(6),
pp. 3594-3599.
(doi: 10.1116/1.1321271)
This list was generated on Fri Aug 16 21:50:37 2024 BST.