Course Catalogue

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The lecture course is split into three segments:

Segment A: Silicon Integrated Circuit, Fabrication Techniques

(1) Processing Overview; (2) Silicon; (3) Layer Formation I; (4) Layer Formation II; (5) Lithography & Patterning I; (6) Lithography & Patterning II; (7) Etching Techniques I; (8) Etching Techniques II; (9) Layer Formation III; (10) Layer Formation IV; (11) Back-end Processing; (12) Test Structures.

Segment B: MEMS/Microsystems Fabrication Techniques

(13) MEMS Process Integration; (14) 3-D Structure Fabrication; (15) Wafer Bonding;

(16) Integrating MEMS with CMOS; (17) Metrology Techniques; (18)MEMS Device Examples

Segment C: Case Studies

Lectures (19) and (20) are given by guest lectures from industry who will discuss what is involved in microsystem design, fabrication and optimisation and what is involved in taking a product to market. Past contributors have included Wolfson Microelectronics and Microemissive Displays.

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PHYS5044 Fundamentals of Sensing

2 Hours of Summative Assessment

Edinburgh University does not provide resit examinations for MSc students. In cases where an assessment is affect by reasons of good cause a revised mark, based on other completed assessments, may be substituted.

This module will examine the fabrication processes employed in the manufacture of microelectronic devices and microsystems. Initial lectures will cover the well established, industry standard steps used in silicon CMOS technology. The basic science underlying the individual process steps will be presented, along with key aspects of manufacturing and production strategies. Building on this knowledge base, students will study the enabling technologies required for future advanced MEMS devices and microsystems. The lectures will not be exclusive to silicon processing, but will also examine increasingly important areas such as plastic and organic electronic device manufacture. The cleanroom facilities of the Scottish Microelectronics Centre, based at the University of Edinburgh, will allow students a unique, first-hand experience of a diverse microfabrication toolset, providing the ideal backdrop to this MSc course.

By the end of this course students will be able to: 

Give an essential overview of the IC and microsystem fabrication industry; 

Explain in detail the principles behind the design and fabrication of both semiconductor and MEMs devices; 

Describe the effect of processes on their performance;

Demonstrate a sound knowledge of the available fabrication technologies;

Give a detailed and critical account of possible process architectures;

Demonstrate knowledge of the process plant required to enable microfabrication of devices and systems.

Students must submit at least 75% by weight of the components (including examinations) of the course's summative assessment.